Equipment

3-gun PVD_1

3-gun PVD_2

3-gun PVD_3

3-gun PVD_4

ALD

ICP-RIE

Elipsometer

Aligner_1

Aligner_2

Wet station

Spin coater

Hot plate

Opticmicroscope

Furnace

SEM

XRD

Gas scrubber

Probe station

Semiconductor Parameter Analyzer

Pulse Pattern Generator

Oscilloscope

Array Matrix (1k, 4k)

Probe card (1k, 4k)

Thermal controller

Auto PGM